Title: SPTS - etch, deposition and thermal equipment for semiconductor industry
Description: SPTS manufactures etch, deposition and thermal systems for customers in MEMS, Power Devices, Optoelectronic, Compound Semiconductor, Advanced Packaging and Data Storage.
Keywords:
SPTS Technologies,
SPTS,
STS,
Aviza,
plasma etch,
silicon DRIE etch,
ICP etch,
PECVD,
PVD,
compound semiconductor,
LEDs,
MEMS,
3D-IC,
DSi,
DRIE,
HF etch,
thermal processing